High-Performance Vacuum Feedthroughs
A vacuum feedthrough must transmit electrical power or signals without creating an unacceptable leak path through the chamber wall. In high-vacuum and ultra-high-vacuum equipment, an unsuitable sealing interface can compromise chamber pressure, contaminate the process environment, and interrupt equipment operation.
Designed for Vacuum Integrity
High-performance vacuum feedthroughs combine an insulating ceramic body with conductive pins and a metal mounting structure. Alumina ceramic provides electrical isolation, while a properly engineered ceramic-to-metal joint supports sealing integrity.
The design and verification of ceramic-to-metal brazed joints are particularly important when the assembly must withstand pressure differences and thermal cycling.
Materials and Performance Requirements
Depending on the application, material options may include alumina ceramic, copper conductors, Kovar alloy, stainless steel, and compatible brazing alloys. The selection must account for thermal expansion, corrosion resistance, electrical loading, and operating temperature.
Meetcera’s ceramic metallization process capabilities support the preparation of ceramic components for suitable metal joining processes.
For demanding vacuum systems, specify the operating pressure, allowable helium leak rate, bakeout temperature, flange interface, and electrical test conditions. Leak-rate performance must be confirmed for the actual assembly and test method, rather than assumed from the product category.
Typical Applications
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Semiconductor process and vacuum deposition equipment
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Electron microscopes and analytical instruments
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Vacuum furnaces and industrial coating systems
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Scientific research and accelerator equipment
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Vacuum electronic devices and specialized instruments
Request a Custom Vacuum Feedthrough
Share your chamber pressure, flange standard, electrical requirements, temperature range, and acceptance criteria. Meetcera can review your requirements and discuss a configuration through our custom vacuum feedthrough solutions.
